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MuPix and ATLASpix

Architectures and Results MuPix and ATLASpix Architectures and Results

Vertex 2019 Workshop

Lopud Island, 14.-18. October, 2019 André Schöning

Physikalisches Institut, Universität Heidelberg

on behalf of the Mu3e and ATLAS HV-CMOS collaborations

(2)

MuPix for Mu3e & ATLASpix for ATLAS

Search for B(µ

+

→ e

+

e

+

e

-

) < 10

-15

- 10

-16

10

8

-10

9

muon decays (tracks) per second

→ see Mu3e talk by Frank Meier (Thursday)

Multi-purpose Experiment @ LHC

Alternative for ITK Pixel Tracker (HL-LHC)

(3)

active sensor → hit finding & digitisation & zero suppression & readout low noise O(50e) → low threshold

small depletion region of ≤ 30 μm → m → thin sensor ~50 μm → m

standard HV-CMOS (60 - 120 V) process → low production costs continuous and fast readout (serial link) → high rate applications

I.Peric, et al., NIM A 582 (2007) 876

transistor logic embedded in N-well (“smart diode array”)

N-well

P-substrate Particle

High Voltage - Monolithic Active Pixel Sensor

HV-MAPS

charge collection by drift!

(4)

Example: Mupix8 Architecture

MuPix8

active periphery & SM

MuPix8

(5)

PixelsPeriphery

State machine

active pixel matrix

periphery

(5-10% total area):

“mirror” cells state machine VCO, PLL, ...

“real” cells

MuPix Chip Design

column drain RO

(6)

PixelsPeriphery

State machine

Sensor

Charge sensitive amp

Source follower

analog cell:

reverse biased -85V

charge sensitive amplifier

source follower

MuPix Chip Design

(7)

PixelsPeriphery

State machine

Transmission line

transmission line:

send signal to corresponding mirror cell

MuPix Chip Design

(8)

PixelsPeriphery

State machine

tune DAC

amp baseline

global threshold

mirror cell:

comparator for discrimination

threshold and baseline by tuning DACs

tune threshold DAC

comparator

MuPix Chip Design

(9)

PixelsPeriphery

State machine

hit sequence:

signal generation

MuPix Chip Design

(10)

PixelsPeriphery

State machine

hit sequence:

signal generation

amplification

MuPix Chip Design

(11)

PixelsPeriphery

State machine

hit sequence:

signal is generated

charge amplified

received in mirror pixel

MuPix Chip Design

(12)

PixelsPeriphery

State machine

hit sequence:

signal is generated

charge amplified

received in mirror pixel

discriminated

MuPix Chip Design

(13)

PixelsPeriphery

State machine

PixelsPeriphery

State machine

hit sequence:

signal is generated

charge amplified

received in mirror pixel

discriminated

scaler generated from clk

1 2 3 4

MuPix Chip Design

(14)

PixelsPeriphery

State machine

PixelsPeriphery

State machine

Time- stamp

hit sequence:

signal is generated

charge amplified

received in mirror pixel

discriminated

scaler generated from clk

timestamp generation

MuPix Chip Design

(15)

PixelsPeriphery

State machine

PixelsPeriphery

State machine

Time- stamp Data

Serialiser

hit sequence:

signal is generated

charge amplified

received in mirror pixel

discriminated

scaler generated from clk

timestamp generation

hit address and timestamp send to serializer

MuPix Chip Design

(16)

PixelsPeriphery

State machine

PixelsPeriphery

State machine

Data stream Serialiser

Data Time- stamp

Finally, all detected hits are sent out via a serial link

1.25 -1.6 Gbit/s

Eye diagram measured with Mupix prototype

Maximum readout rate is 33 Mhits/s per link

MuPix Chip Design

(17)

HV-MAPS Prototypes - History

50 µm I. Peric et al (2007)

MuPix1

Mu3e-Experiment

MuPix2

MuPix6

…..

MuPix7

Mupix7 was the first small scale prototype integrating all relevant features of a fully monolithic chip

(VCO, PLL, state machine, ...)

Mu3e & ATLAS (HL-LHC)

Mupix9

ATLASpix2

AMS H18 (IBM)

AMS AH18

TSI H18

ATLASpix3

”demonstrator

ATLASpix1

Mupix10

NEW!

(18)

M2

s im pl e

A B&C

MuPix8 & ATLASpix1

trigger buffers current

drivers

continuous readout source

follower

s im pl e + is o- P M O S

Mupix8

pixel: 80 x 81 µm

2

200 rows x 48 cols

amplifier in pixel cell

discriminators in periphery

6 bit ToT

state machine

serial link up to 1.6 Gbit/s

ATLASpix

pixel: 40 x 130 µm

2

400 rows x 25 cols

amplifier in pixel cell

discriminators in active pixel cell

6 bit ToT

state machine

serial link up to 1.6 Gbit/s

continuous RO

(19)

Mupix8 versus ATLASpix_simple

MuPix8

ATLASpix_simple

serial link

(20)

Results in the following ...

Large number of testbeams (exploiting several telescopes):

CERN: pions 180 GeV

DESY: electrons 3-6 GeV

Fermilab: pions 180 GeV

MAMI: electrons ~870 MeV → very focused beam & high rate!

PSI: pions ~250 MeV/c, protons ~500 MeV/c → high rate!

Lab characterisations

charge injection

radioactive sources

LED, Laser

X-Ray fluorescence

...

(21)

Mu3e MuPix &

ATLAS HV-CMOS Collaborations

(22)

MuPix/ATLASpix (HV-MAPS) Telescope

8 MuPix8 Layers 3 MuPix8 Layers

+

1 ATLASpix

HV-MAPS fully integrated as telescope layers (since 2013)

O(10) telescopes built (Mupix6,7,8 & ATLASpix)

long experience in reliably operating HV-MAPS with high particle rates (up to 2.5 MHz)

(23)

Mupix8 Performance Plots

efficiency

~99.9%

noise

~1Hz/pixel

100mV ~ 1300 e

-

80 Ω cm

(24)

Mupix/ATLASpix Readout Architecture

Problem:

→ capacitive coupling between RO lines

ATLASpix (discriminator in cell)

✔ binary(discriminated) RO

MuPix (analog amplified signal)

✗ source follower (A)→ cross talk

✗ current driver (B+C)→ in principle ok,

but design issues with Mupix8

(25)

Mupix8 Cross Talk (Source Follower)

“Triplet” Probability Time over Threshold (dE/dx)

row number is proportional to length of trace!

(26)

Mupix8: Time over Threshold and the 2-Discriminator Scheme

Methods for timewalk correction and mitigation:

ToT correction

sensing & validation thresholds

combination

(27)

Mupix8: Timewalk Correction

Good Correlation between ToT and hit delay time!

“small signals come late...”

(28)

Mupix8 matrix A: Time Resolution Results

Time resolutions

(of full matrix & after delay corrections)

σ=6.5 ns (combined)

σ=8.8 ns (2-threshold) σ=7.6 ns

(timewalk corr.)

σ=10.5 ns (w/o correction)

pixel time resolutions

Time resolutions

(of full matrix & after delay corrections)

σ

time

(ns)

combined:

2-thr & TWC

(29)

Goals

HVMAPS demonstrator for ATLAS 4

th

pixel barrel layer

compatible with ITK pixel (LHC) specification

compatible with FE-I4 frontend chip

ATLASpix1 is a first technology demonstrator (no FE-I4 functionalities)

ATLASpix

untriggered

triggered

(30)

ATLASpix_simple

IsoPMOS → CMOS discriminator NMOS discriminator

Note, discriminator

is implemented

in pixel!

(31)

ATLASpix_simple

single pixel

single pixel

(32)

ATLASpix_simple_iso

(CMOS comparator)

ATLASpix_simple

(NMOS comparator) MuPix8

5.8 ns 6.8 ns 3.6 ns 3.7 ns

5.9 ns 8.1 ns

[sampling 16 ns] [sampling 16 ns]

6.1 ns (5.8 ns) 6.5 ns (6.2 ns) [sampling 8 ns]

8.8 ns w/o TWC:

with TWC:

internal res.:

Time Resolution with and w/o TWC

(short traces)

(33)

Substrate Resistivity Dependence ATLASpix1

80 Ω cm 200 Ω cm

significant larger depletion with higher resistivity!

(34)

Neutron Irradiated 80 Ωcm ATLASpix1 @ 60V

2·10

15

neq/cm2 (81 pixels masked) 10

15

neq/cm2 (38 pixels masked) 5·10

14

neq/cm2 (19 pixels masked)

80 Ω cm d=62 µm bias=60V T ~ 5°C

no tuning fluence-dependence

(35)

Summary of Efficiencies after Irradiation

no tuning of pixels! ≤ 81/10000 pixel masked

Efficiency

40 Hz

sub-

strate thick-

ness bias voltage

(#masked pixel)

fluence

(neq/cm

2

) (Ω

cm) (µm) 60 V 70/75 V 80/85 V 90/95 V

n 2e15 80 62 98.5% 98.4% 98.6%

n 1e15 80 62 99.3% 99.5% 99.5%

n 5e14 80 62 99.5%

n 2e15 200 100 96.5% 98.7% 98.7%

n 1e15 200 100/725 98.7% 99.4% 99.5% 99.4%

n 5e14 200 100 99.2%

p 5e14 200 100 ≥ 99.6% ≥ 99.7% ≥ 99.9%

p 1e14

(10 MRad biased) 200 725 ≥ 99.7%

≥ means that the 40 Hz/pixel average noise limit was not reached

(36)

Single matrix: 132 x 372 pixel

pixel size 150 x 50 µm²

Column drain readout with and w/o trigger

Radiation hard design with SEU tolerant global memory

In-pixel comparator

64/66 bit Aurora encoder

Command decoder with clock recovery

prepared for serial powering (shunt LDOs)

20 mm

2 m m 18 m m

New ATLASpix3 (TSI)

receivd in Sept. 2019

(37)

Triggered and triggerless readout possible via two

concurrent readout structures

separate control units

Configuration via SEU tolerant registers

Data transmitted:

triggerless: 8/10b Aurora encoded

triggered: 64/66b Aurora

encoded

EoC 0 EoC 1

Trigger Signal

Data Out

Trigger Table (FIFO)

Control Unit Aurora Encoder (with FIFO)

Trigger Buffer

x N

Trigger Buffer

x N

Trigger Buffer

x N Sensor Pixel

EoC 0 EoC 1

Control Unit

Hit Buffer

2 encoders,

triggered one with FIFO

ATLASpix3 – Readout Architecture

(38)

threshold scan for the whole matrix

55

Fe decay signals equal a charge injection of about 300 mV

untuned matrix

hist_0 Entries 49099 Mean 0.3119 RMS 0.0457

Threshold (in V) 0 0.05 0.1 0.15 0.2 0.25 0.3 0.35 0.4 0.45 0.5

Counts

0 500 1000 1500 2000 2500 3000 3500 4000

hist_0 Entries 49099 Mean 0.3119 RMS 0.0457 hist_1

Entries 49099 Mean 0.02034 RMS 0.01942

Noise (in V) 0 0.02 0.04 0.06 0.08 0.1 0.12 0.14

Counts

0 500 1000 1500 2000 2500 3000 3500 4000

4500 Entries hist_149099

Mean 0.02034 RMS 0.01942

55

Fe

ATLASpix3 - Threshold Distribution

noise

(39)

Threshold tuning:

detection thresholds are adjusted to µ+3σ of untuned distribution

conducted for two rows (in total 264 pixels):

σ

trimmed

= 9.5mV ↔ ~ 50 e

-

Threshold (in V)

0.15 0.2 0.25 0.3 0.35 0.4

Counts

0 20 40 60 80 100

untrimmed Thresholds trimmed Thresholds

Pixel Trimming

ATLASpix3 – Matrix Tuning

(40)

ATLASpix3 – Summary

ATLASpix3 is the first large (20 x 20 mm

2

) HV-CMOS

high rate capable

radiation tolerant

triggered & untriggered RO

ATLASpix3 seems to be fully operational

→ but more characterization studies required

Unfortunately, CMOS option is no longer followed up for ATLAS-ITK However, ATLASpix3 is multi-purpose and serves as blueprint for

LHCb “Mighty Tracker” project

Telepix (beam telescope)

(41)

Conclusions & Outlook

HV-MAPS (ATLASpix, MuPix) is an established “technology” and have demonstrated their big potential

Significant advances in ASIC design, also concerning system relevant aspects (e.g. configuration, regulators)

HVMAPS are baseline for several projects/experiment:

Mu3e Phase I

LHCb Mighty Tracker

PANDA (Fair)

P2 at MESA (Mainz)

beam telescopes

(42)

Mu3e Pre-to-Final HV-MAPS: Mupix10

figure

not to scale

!

20mm

submission in Nov. 2019

tbd

1-threshold 1-threshold 1-threshold

(43)

Backup

(44)

Mupix8 Cross Talk (Source Follower)

(45)

Mupix8: Time Resolution Results

(46)

PSI Testbeam with 500 MeV protons

signal height MuPix7 Time Resolution

(47)

Mupix8: Temperature Dependence

(48)

Mupix7 Breakdown Voltage:

AMS H18 versus TSI H18

(49)

Substrate Resistivity Dependence

(50)

Neutron Irrad. 80 Ωcm Sensor @ 2e15 neq

2·10

15

neq/cm

2

80 Ω cm

d=62 µm bias=60V T ~ 5°C

Preliminary

81/10000 pixels are masked; no tuning

80 V 70 V 60 V

HV-dependence

(51)

Leakage Currents: 200 Ω·cm (16.7 MeV p) 1e15 neq/cm 2

I-V Curves for different temperatures temperature dependence

Irradiation campaign with 16.7 MeV protons at BERN with fluence 10

15

neq/cm

2

leakage currents well below 50 µA/cm

2

for temperature T=-20°C up to breakdown

breakdown voltages increase with irradiation (not shown)

Arrhenius prediction approximately holds for irradiated sensors

similar studies for neutrons and for fluences up to 2e15 neq/cm

2

(52)

MuPix Telescopes + Rate Tests

MAMI rate test

875 MeV e

-

maximum rate rate of 1.6 MHz / 5x5 pixels

corresponds to 780 Mhits/cm

2

/s

Rate test at MAMI:

→ very small rate dependence of efficiency!

875 MeV electrons

preliminary

(53)

Effect of Irradation on H35 process

arXiv:18007.09553

increase due to

acceptor removal

(54)

Threshold and Noise Definitions

Charge injections of

increasing strength are sent into a pixel

Count number of detected signals → detection efficiency

Shifted and scaled gaussian error function is fitted to the

data points

0 0.2 0.4 0.6 Injection Voltage (in V)0.8 1 1.2

Efficiency

0 20 40 60 80 100 120 140 160 180 200 220

threshold noise

(55)

Matrix Tuning

The matrix implements a 3 bit tuning DAC and a disable bit for each pixel

Writing of the pixel memories is working and the detection threshold changes linearly with the setting

0 1 2 3 4 5 6 TDAC7

Threshold (in V)

0 0.05 0.1 0.15 0.2 0.25 0.3 0.35 0.4 0.45 0.5

Counts

0 10 20 30 40 50 60

Counts

0 10 20 30 40 50 60

(56)

Power Regulators – MinusReg

MinusReg Linearity

Output Voltage (V)

0,6 0,7 0,8 0,9 1 1,1 1,2 1,3 1,4

VDAC (minus) Setting

80 100 120 140 160 180 200 220

Uout @ 1.00mA Uout @ 10.00mA

Uout @ 20.00mA Regulator Characteristics for Minus

Regulator Output Voltage (V)

0 0,2 0,4 0,6 0,8 1 1,2 1,4

Regulator Load Current (A)

−0,005 0 0,005 0,01 0,015 0,02 0,025 0,03

Minus VDAC setting:

100 112 124 136 148 160 172 184 196

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