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Correction to: Development of a Vaporizer for Gradual Vaporization Control of Precursor Materials in the CVD Process

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Electronic Materials Letters

https://doi.org/10.1007/s13391-021-00311-x CORRECTION

Correction to: Development of a Vaporizer for Gradual Vaporization Control of Precursor Materials in the CVD Process

Tae Min Kim

1,2

 · Hyun Sik Sim

2

 · Jae Wook Jeon

1

© The Korean Institute of Metals and Materials 2021

Correction to:

Electronic Materials Letters (2021) 17:250–259 https:// doi. org/ 10. 1007/ s13391- 021- 00280-1

In the original publication of the article, the third author’s affiliation was published incorrectly. The correct affiliation is given in this correction.

The original article has been corrected.

Publisher's Note Springer Nature remains neutral with regard to jurisdictional claims in published maps and institutional affiliations.

The original article can be found online at https:// doi. org/ 10. 1007/

s13391- 021- 00280-1.

* Jae Wook Jeon

jwjeon@yurim.skku.ac.kr

1 Department of Semiconductor and Display Engineering, Sungkyunkwan University, Seoul, Republic of Korea

2 Memory Technology Innovation Team, Samsung Electronics Co., Ltd., Suwon-si, Republic of Korea

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