C I(A C ) in te rs trip c a p a c ity
C I(D C ) in te rs trip c a p a c ity
C c c o u p lin g c a p a c ity
R b B ia s re s is to r
C b b u lk c a p a c it y
C s trip s trip c a p a c ity C 1 ; C 2
R i in te rs trip re s is ta n c e
P IN H O L E
o h m ic
c o u p lin g
A C - D C
B ia s rin g
to re a d o u t
io n is in g
p a rtic le
B re a k
N - s ilic o n (b u lk S iO 2
P + - Im p la n t
A l- re a d o u t- s trip s D C - P a d
A C - B o n d - P a d
B ia s rin g
G u a rd rin g
C c C i(D C )
C i(A C )
R i C b
C s trip C 1
C 2
R b
R b C c
S o m e d a ta :
th ic k n e s s 3 0 0 m P itc h 1 1 2 m
S rip le n g th 7 2 , 6 8 m S te re o a n g le 1 . 2 ° 5 1 2 s trip s p e r s id e
3-D View of an ISL sensor
N-side (stereo)
P-side
3 ISL sensors are ganged together with one hybrid to form a ladder; a module consisting of 2 ladders is then mounted on a carbon fiber spaceframe
195 cm
CDF II
PINHOLE MEASUREMENT.
We apply 60V between implant
and Al-readout-strip and measure the current.
The quality control:
1. IV scan
2. pinhole check for each strip 3. Leakage current
for each strip